Ion Source
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Last update: 5 June 2024
TQ8050/TQ8040/TQ8030/QP2020/QP2010 Ultra/QP2010 Plus ion source
| Name | P/N | Qty | Remarks | Applicable models |
|---|---|---|---|---|
| EI ion source box (single unit) |
225-17697-91
|
1 | Not including repeller assembly, heat treated |
TQ8050 TQ8040 TQ8030 QP2020 QP2010 Ultra QP2010 Plus |
| EI repeller assembly |
225-17659-91
|
1 | Including insulator bushes, heat treated |
TQ8050 TQ8040 TQ8030 QP2020 QP2010 Ultra QP2010 Plus |
| CI ion source box (single unit) |
225-17705-91
|
1 | Not including repeller assembly, heat treated |
TQ8050 TQ8040 TQ8030 QP2020 QP2010 Ultra QP2010 Plus |
| NCI ion source box (single unit) |
225-17705-92
|
1 | Not including repeller assembly, heat treated |
TQ8050 TQ8040 TQ8030 QP2020 QP2010 Ultra QP2010 Plus |
| CI/NCI repeller assembly |
225-17710-91
|
1 | Shared by CI/NCI, including insulator bushes, heat treated |
TQ8050 TQ8040 TQ8030 QP2020 QP2010 Ultra QP2010 Plus |
| Insulator bush |
225-01068
|
1 | Two are used in the repeller assembly. |
TQ8050 TQ8040 TQ8030 QP2020 QP2010 Ultra QP2010 Plus QP2010 SE QP2010 PARVUM2 |
| Filament |
225-10340-91
|
1 | Shared by EI/CI/NCI |
TQ8050 TQ8040 TQ8030 QP2020 QP2010 Ultra QP2010 Plus QP2010 SE QP2010 PARVUM2 |
QP2010 SE/QP2010/PARVUM2 ion source
| Name | P/N | Qty | Remarks | Applicable models |
|---|---|---|---|---|
| EI repeller assembly |
225-10442-91
|
1 | Including insulator bushes, heat treated |
QP2010 SE QP2010 PARVUM2 |
| CI ion source box (single unit) |
225-10617-91
|
1 | Not including repeller assembly, heat treated |
QP2010 SE QP2010 PARVUM2 |
| NCI ion source box (single unit) |
225-10617-92
|
1 | Not including repeller assembly, heat treated |
QP2010 SE QP2010 PARVUM2 |
| CI/NCI repeller assembly |
225-10605-91
|
1 | Shared by CI/NCI, including insulator bushes, heat treated |
QP2010 SE QP2010 PARVUM2 |
| EI ion source box (single unit) |
225-10446-91
|
1 | Not including repeller assembly, heat treated |
QP2010 SE |
Common ion source parts
| Name | P/N | Qty | Remarks |
|---|---|---|---|
| Abrasive cloth for cleaning |
085-35124-03
|
20 pcs. | For cleaning the ion source (for ultrafine finishing) |
| Abrasive cloth, cut |
225-20804-91
|
1 pc. | For cleaning the ion source (cut) |
| PTFE tube |
016-37575-03
|
10m | For introducing the reaction gas to the ion source (for CI and NCI) |
Supplementary keywords: CI filament, NCI filament