Laminar-type Diffraction Gratings for VUV/Soft X-ray Region

Overview

AFM Image of Laminar Gratings

Applying holographic exposure method and ion-beam etching technology, Shimadzu has developed laminar gratings for spectroscopy in a range from the vacuum ultraviolet region to the soft X-ray region. These gratings have grooves with a rectangular profile, which are directly etched into blanks made of, for example, synthetic silica. (Refer to Fig.1.) Laminar gratings are recommended for oblique-incidence applications.

Applications

synchrotron radiation facility

Fig.1 Groove Profile for Laminar Gratings

Fig.2 Measurement for Absorption Spectrum of Argon

Coating Materials

Correlation between Coating Material and Reflectance

※The graph is a simulation result using an ideal plane mirror with a film thickness of 30 nm and incident angle of 88 degrees. (Not guaranteed.)

※Wavelength can be converted to photon energy by the following equation:
　　E ≈ 1240 / λ
　E [eV]: Photon energy
　λ [nm]: Wavelength

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Overview