Laminar-type Replica Diffraction Gratings for VUV/Soft X-ray Region
- Aberration-corrected Laminar-type Replica Diffraction Gratings for flat-field Polychromators in the range from Vacuum Ultra-Violet(VUV) to Soft X-ray Region. We offer a wide range of lineups for wavelengths from 0.6 nm to 200 nm.
- Less high order light due to laminar type grooves configuration, Low stray light by holographic manufacturing technology, and high resolution from aspherical waves exposure method.
- Easy to design spectrometers with array-type detectors.
- Suitable for monitoring EUV lights as well as for Emission Spectroscopy.
Applications
- Spectroscopy in the VUV/XUV(EUV)/soft X-ray region.
- High-harmonic generation（HHG）
| Code number | Old Code number | Groove density (at grating center) |
Wavelength range | Detector length | Mounting parameters | Dimensions | Coating material | |||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| N (grooves /mm) |
λ1-λ2 (nm) |
L (mm) |
r (mm) |
α (deg.) |
r1’ (mm) |
β1 (deg.) |
r2’ (mm) |
β2 (deg.) |
ri’ (mm) |
βi (deg.) |
WxHxT (mm) |
|||
| L0120-50-200 | 30-007 | 120 | 50-200 | 25.3 | 237.0 | 87.00 | 236.7 | 83.04 | 241.1 | 77.07 | 235.0 | 90.00 | 50x30x10 | Au |
| L0300-20-80 | 30-006 | 300 | 20-80 | 25.3 | 237.0 | 87.00 | 236.7 | 83.04 | 241.1 | 77.07 | 235.0 | 90.00 | 50x30x10 | Au |
| L1200-5-20 | 30-002 | 1200 | 5-20 | 25.3 | 237.0 | 87.00 | 236.7 | 83.04 | 241.1 | 77.07 | 235.0 | 90.00 | 50x30x10 | Au |
| L1200-4-9-NI | 30-005 | 1200 | 3.5-8.5 | 11.1 | 237.0 | 87.07 | 234.8 | 83.98 | 236.2 | 81.30 | 233.5 | 90.00 | 50x30x10 | Ni |
| L2400-1-4 | 30-004 | 2400 | 0.6-4 | 19.4 | 236.8 | 88.65 | 233.9 | 86.64 | 235.8 | 81.94 | 233.5 | 90.00 | 50x30x10 | Au |
| L2400-1-6 | 30-001 | 2400 | 1-6 | 23.5 | 237.0 | 88.65 | 235.6 | 85.81 | 238.5 | 80.17 | 235.0 | 90.00 | 50x30x10 | Au |
| L2400-1-7 | 30-003 | 2400 | 1-7 | 26.8 | 236.7 | 88.60 | 235.8 | 85.79 | 239.5 | 79.39 | 235.0 | 90.53 | 50x30x10 | Au |
| L0500-27-135 | 30-009 | 500 | 27-135 | 68.5 | 379.0 | 80.00 | 372.7 | 76.24 | 394.6 | 66.54 | 362.0 | 90.00 | 50x30x10 | Au |
| L1500-9-45 | 30-008 | 1500 | 9-45 | 68.5 | 379.0 | 80.00 | 372.7 | 76.24 | 394.6 | 66.54 | 362.0 | 90.00 | 50x30x10 | Au |
| L3600-1-6 | - | 3600 | 1-6 | 70.0 | 564.0 | 88.60 | 565.4 | 84.94 | 575.8 | 77.99 | 563.2 | 90.00 | 70x40x12 | Au |
Standard Specifications
| >Grating Type | Unequally spaced curved-groove laminar-type replica grating*1 |
|---|---|
| >Blank material | BK-7 or equivalent |
| >Dimension tolerance | ±0.2(W)×±0.2(H) |
| >Center thickness tolerance | ±0.5(Ｔ) |
| >Effective area | Total area less 5mm strip around the perimeter |
| >Groove density tolerance | ±0.5% |
| >Scratches and digs | 80-50 (in accordance with MIL-O-13830A) |
*1: The grating grooves are formed with resin.
*Be sure to prevent condensation. Otherwise, it causes significant deterioration of optical characteristics.
※RoHS compliant (Directive 2011/65/EU + (EU)2015/863 on the Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment)